Conference Papers

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 2022
202T. Byambadorj, Y. Qin, Y. Gianchandani, “Blocking Pressure Enhancement in SOI Through-Wafer Monolithic Knudsen Pumps,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘22), Tokyo, Japan, Jan. 9-13, 2022, pp. 1-4, (Finalist, Outstanding Student Paper Competition)
2021
201A.M. Cooke, D. Garmire, J. Davis, M. Creech, Y. Gianchandani, “A Wireless Optical Position Sensing and Communications System for a Locking Differential,” IEEE International Workshop on Metrology for Automotive (MetroAutomotive), July 1-2, 2021, pp. 237-242, doi: 10.1109/MetroAutomotive50197.2021.9502863. (A.M. Cooke received 2nd place award for “Best Paper Presented by a Woman”)
2020
200J.R. Ordonez Varela, J. Boero-Rollo, A. Le Beulze, N. Vellaluru, P.P. Dutta, A. Benken, Y. Gianchandani, “Wireless Advanced Nanodevices for Well Monitoring,” Abu Dhabi International Petroleum Exhibition and Conference, Nov. 9-12, 2020, pp. 1-19
2019
199X. Zhao, Y. Qin, Y.B. Gianchandani, “Automatic Peak Integration and Baseline Correction for Micro-scale Gas Chromatographs Using Continuous Wavelet Transform,” IEEE Sensors Conference,  Montreal, Canada, Oct. 2019, 4 pp.
198P. Dutta, T. Li, Y.B. Gianchandani, “A Sensing Microsystem for High Resolution Pressure Gradient Measurement in Core-Flood Experiments,” IEEE Sensors Conference, Montreal, Canada, Oct. 2019, 4 pp.
197C.-H. Yeh, X. Zhao, Y. Qin, Y. Gianchandani, Y. Suzuki, K. Morimoto, “Deep Electrode and Parylene E Based Capacitive VOC Detector for Micro Gas Chromatograph Application,” IEEE International Conference on Solid State Sensors, Actuators, and Microsystems (Transducers), Berlin, Jun. 2019, 4 pp.
196H. Jeong, J. Yi, Y.B. Gianchandani, J. Park, “Extracellular Vesicles Fractionated in Drying Droplet,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS ’19), Seoul, S. Korea, Jan. 2019, 4 pp.
 2018
195H.-T. Lu, Y. Qin, Y.B. Gianchandani, “A Hybrid Three-Way Valve for Gas Chromatography Systems,” IEEE Sensors Conference, pp. 1-4, New Delhi, India, Oct. 2018
 2017
194S. R. Green, Y.B. Gianchandani, “Wireless Magnetoelastic Transducers for Biomedical Applications,” Proc. SPIE 10194, Micro- and Nanotechnology Sensors, Systems, and Applications IX Conference 1019412, paper 10194-37, 12 pp., Anaheim, CA, April 9-13, 2017 (invited paper), doi: 10.1117/12.2263677
193N. Vellaluru, Y.B. Gianchandani, T. Li, “Facile Batch Mode Process for High Capacity Rechargeable Nickel-Zinc Microbatteries,” IEEE International Conference on Solid State Sensors, Actuators, and Microsystem (Transducers), Kaohsiung, Taiwan, Jun. 2017, 4 pp.
192R.M. Nambisan, S.R. Green, J.D. Stein, Y.B. Gianchandani, “In Situ Acousto-magnetic Interrogation of a Glaucoma Valve with Integrated Wireless Microactuator,” IEEE International Conference on Solid State Sensors, Actuators, and Microsystem (Transducers), Kaohsiung, Taiwan, Jun. 2017, 4 pp. (Finalist, Outstanding Student Paper Competition)
191Q. Chen, Y. Qin, Y. Gianchandani, “A Bidirectional Knudsen Pump with Superior Thermal Management for Micro-Gas Chromatography Applications,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS ’16), Las Vegas, Jan. 2017, 4 pp.
 2016
190Y. Qin, Y.B. Gianchandani, “Microfabricated Knudsen Pumps and Application to Microscale Gas Chromatographs,” Asia-Pacific Conference on Transducers and Micro and Nano Technology (APCOT), Kanazawa, Japan, June 2016 (invited plenary), 2 pp.
 2015
189S. Green, Y.B. Gianchandani, “Microfabricated Magnetoelastic Sensors and Actuators: Opportunities and Challenges,” IEEE Sensors Conference, Busan, Korea, Nov. 2015 (invited paper), pp. 763-6
188
Y. Qin, Y.B. Gianchandani, “An All Electronic, Fully Microfabricated Micro Gas Chromatograph,” IEEE International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers), Anchorage, Alaska, June 2015
 2014
187
S. Nayake, H. Sugimoto N. Gupta, Y.B. Gianchandani, “Thermal Method of Gas Separation with Micro-pores,” IEEE Sensors Conference, Valencia, Spain, Nov. 2014
186
K. Morimoto, Y. Qin, Y.B. Gianchandani, “Modeling and Characterization of the Transient Performance of a Gas Detector Based on Fringe-Field Capacitance,” IEEE Sensors Conference, Valencia, Spain, Nov. 2014
185
H. Jeong, J. van Tiem, Y.B. Gianchandani, J. Park, “Nano-Particle Separation Using Marangoni Flow in Evaporating Droplets,” Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, South Carolina, June 2014
184
A. Viswanath, T. Li, Y.B. Gianchandani, “High Resolution Micro Ultrasonic Machining (HR-µUSM) for Post-Fabrication Trimming of Fused Silica 3D Microstructures,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS ’14), San Francisco, Jan. 2014
183
J. Tang, S. Green, Y.B. Gianchandani, “Miniaturized Magnetoelastic Tags Using Frame-Suspended Hexagonal Resonators,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS ’14), San Francisco, Jan. 2014
182
H. Jeong, T. Li, Y.B. Gianchandani, J. Park, “Ultrasound-Assisted Micro-Knife for Cellular Scale Surgery,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS ’14), San Francisco, Jan. 2014
181
Y. Qin, Y.B. Gianchandani, “A Micro Gas Chromatograph With Integrated Bi-Directional Pump for Quantitative Analyses,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS ’14), San Francisco, Jan. 2014
180
S. An, Y. Qin, Y.B. Gianchandani, “A Monolithic Knudsen Pump With 20 sccm Flow Rate Using Through-Wafer ONO Channels,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS ’14), San Francisco, Jan. 2014
179
X. Luo, C.K. Eun, Y.B. Gianchandani, “Fabrication of a Monolithic Microdischarge-Based Pressure Sensor for Harsh Environments,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS ’14), San Francisco, Jan. 2014
 2013
178
R. Malhotra, Y.B. Gianchandani, “A Microdischarge-Based Neutron Radiation Detector Utilizing Sputtered Gadolinium Films for Neutron Conversion,” IEEE Sensors Conference, Baltimore, MD, Nov. 2013
177
V. Pepakayala, Y.B. Gianchandani, “A Passive, Wireless Strain Sensor Using a Microfabricated Magnetoelastic Beam Element,” IEEE Sensors Conference, Baltimore, MD, Nov. 2013
176
S. Nayake, H. Sugimoto, N.K. Gupta, Y.B. Gianchnadani, “Thermally Enhanced Membrane Gas Separation,” Annual Meeting of Japan Society of Fluid Mechanics, Tokyo, September 2013
175
Y. Qin, Y.B. Gianchandani, “A Facile, Standardized Fabrication Approach and Scalable Architecture for a Micro Gas Chromatography System with Integrated Pump,” IEEE International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers), Barcelona, Spain, June 2013
174
A. Viswanath, S.R. Green, J. Kosel, Y.B. Gianchandani, “Conformally Integrated Stent Cell Resonators for Wireless Monitoring of Peripheral Artery Disease,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS ’13), Taipei, Jan. 2013
 2012
173
X. Luo, Y. B. Gianchandani, “A High Voltage Generator Utilizing a Single PZT Element with Series-Connected Electrodes,” IEEE Conference on Sensors, Taipei, Oct. 2012, pp. 993-996
172
T. Li, K. Ding, W. E. Seyfried, Jr., Y. B. Gianchandani, “A Micromachined Chemical Sensor for Sea Floor Environments: Initial Results,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head), Hilton Head Island, SC, June 2012, pp. 173-176
171
S. An, N. K. Gupta, Y. B. Gianchandani, “A Monolithic 162-stage Two-part Knudsen Pump for High Compression Ratio,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head), Hilton Head Island, SC, June 2012, pp. 14-17
170
J. Tang, S. R. Green, Y. B. Gianchandani, “Miniature Wireless Resonant Rotary Motor Actuated by Lithograhically Micromachined Magnetoelastic Foil,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head), Hilton Head Island, SC, June 2012, pp. 86-89
169
T. Li, Q. Bai, Y. B. Gianchandani, “Using Drie Silicon as a Cutting Tool for High Precision Micromachining of Metal Alloys,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head), Hilton Head Island, SC, June 2012, pp. 477-480
168
N. K. Gupta, S. An, Y. B. Gianchandani, “A Monolityic 48-stage Si-micromachined Knudsen Pump for High Compression Ratios,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, Jan. 2012, pp. 152-155
167
S. Banerjee, F.M. Ozkeskin, Y. Gianchandani, G.K. Ananthasuresh, “An Optimized Steel Micro-switch with Low Switching Voltage and High Recoil Force,” International Conference on Smart Materials Structures and Systems (ISSS’12), Bangalore, India, Jan. 4-7, 2012
 2011
166
E. Hendarto, Y.B. Gianchandani, “Marangoni-Drive Micromotor in Liquid Medium,” IEEE International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers), Beijing, China, June 2011, pp. 246-249
165
J. Liu, N.K. Gupta, X. Fan, K.D. Wise, Y.B. Gianchandani, “A Pressure Programmable Gas Chromatography Microsystem Utilizing Motionless Knudsen Pump, Fiber-Integrated Optical Detector, and Silicon Micromachined Separation Column,” IEEE International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers), Beijing, China, June 2011, pp. 803-806
164
T. Li, Y.B. Gianchandani, “Batch Mode Micromanufacturing Based on Micro Electro-Discharge Machining and Micro Ultrasonic Machining for Micro Electro Mechanical Systems (MEMS),” Society of Manufacturing Engineers (SME) MicroManufacturing Conference & Exhibits, Chicago, April 2011, paper TP11-PUB15, pp. 1-8
163
K. Visvanathan, T. Li, Y.B. Gianchandani, “3D-SOULE: A Fabrication Process for Large Scale Integration and Micromachining of Spherical Structures,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS ’11), Cancun, Jan. 2011
162
T. Li, Y.B. Gianchandani, “An Active Tissue-Contrast Sensing Microsystem for Biopsy Needles: Initial Results,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS ’11), Cancun, Jan. 2011
161
C.K. Eun, Y.B. Gianchandani, “A Microdischarge-Based Radiation Detector Utilizing Stacked Electrode Arrays in a TO-5 Package,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS ’11), Cancun, Jan. 2011
160
S.R. Green, Y.B. Gianchandani, “Miniature Penning Cell Array for On-Chip Vacuum Pumping,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS ’11), Cancun, Jan. 2011
159
F. Ozkeskin, S. Choi, K. Sarabandi, Y.B. Gianchandani, “Metal Foil RF Micro-Relay with Integrated Heat Sink for High Power Applications,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS ’11), Cancun, Jan. 2011
 
2010
158
F. Ozkeskin, Y.B. Gianchandani, “Double-Cantilever Micro-Relay with Integrated Heat Sink for High Power Applications,” The 10th International Workshop on Micro and Nano Technology for Power Generation and Energy Conversion Applications (PowerMEMS 2010), Leuven, Belgium, Nov. 30 – Dec. 3, 2010, pp. 159-162
157
E. Hendarto, Y.B. Gianchandani, “Directed Precipitation of Suspension Particles onto Blank Substrates Using Marangoni Cells,” International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), Groningen, The Netherlands, October 3-7 2010, pp. 1100-1102
156
K. Visvanathan, T. Li, Y.B. Gianchandani, “In Situ Monitoring of Cauterization with a Biopsy Needle Using Impedance Characteristics of Embedded Piezothermal Elements,” International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), Groningen, The Netherlands, October 3-7 2010, pp. 1478-1480
155
C.K. Eun, Y.B. Gianchandani, “A Wireless-Enabled Radiation Detector Using Micromachined Steel and Glass Elements in a TO-5 Package,” Solid-State Sensors and Actuators and Microsystems Workshop (Hilton Head ’10), Hilton Head Island, South Carolina, June 2010, pp. 380-381
154
S.A. Wright, H.A. Zipperian, Y.B. Gianchandani, “A 15 atm. Pressure Sensor Utilizing Microdischarges in a 1.6 mm3 Ceramic Package,” Solid-State Sensors and Actuators and Microsystems Workshop (Hilton Head ’10), Hilton Head Island, South Carolina, June 2010, pp. 53-56
153
F. Ozkeskin, Y.B. Gianchandani, “A Hybrid Technology for Pt-Rh and SS316L High Power Micro-Relays,” Solid-State Sensors and Actuators and Microsystems Workshop (Hilton Head ’10), Hilton Head Island, South Carolina, June 2010, pp. 182-185
152
A.T. Evans, S. Chiravuri, Y.B. Gianchandani, “A Piezoelectric Valve Manifold with Embedded Sensors for Multi-Drug Delivery Protocols,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 10), Hong Kong, Jan. 2010, pp. 1027-1030
151
T. Li, Y.B. Gianchandani, “A High-Speed Batch-Mode Ultrasonic Machining Technology for Multi-Level Quartz Crystal Microstructures,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 10), Hong Kong, Jan. 2010, pp. 348-401
150
N.K. Gupta, Y.B. Gianchandani, “A High-Flow Knudsen Pump Using a Polymer Membrane: Performance At and Below Atmospheric Pressure,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 10), Hong Kong, Jan. 2010, pp. 1095-1098
149
K. Visvanathan, Y.B. Gianchandani, “Biopsy Needle Tract Cauterization Using and Embedded Array of Piezoceramic Microheaters,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 10), Hong Kong, Jan. 2010, pp. 987-1000
148

Y.B. Gianchandani, “Emerging Research in Micro and Nano Systems: Opportunities and Challenges for Societal Impact,” SPIE Photonics West, MOEMS-MEMS Conference, San Francisco, (invited plenary), paper no. 7593-201, Jan. 2010,
pp. 1-8

 2009
147
Y.B. Gianchandani, “Hybrid Micro-Technologies for Medical Applications,” IEEE International Engineering in Medicine and Biology Conference (EMBC), Minneapolis, MN, (invited paper), Sep. 2009, pp. 6691-6692
146
K. Visvanathan, Y.B. Gianchandani, “Ultrasonic Microheaters Using Piezo-Ceramics for Cauterization and Other Applications,” IEEE International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers), Denver, Colorado, June 2009, pp. 2421-2424
145
K. Visvanathan, N.K. Gupta, M.M. Maharbiz, Y.B. Gianchandani, “Control of Locomotion in Ambulatory and Airborne Insects Using Implanted Thermal Microstimulators,” IEEE International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers), Denver, Colorado, June 2009, pp. 1987-1990
144
N.K. Gupta, Y.B. Gianchandani, “A Planar Cascading Architecture for a Ceramic Knudsen Micropump,” IEEE International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers), Denver, Colorado, June 2009, pp. 2298-2301
143
W. Zhu, M.J. White, G.F. Nellis, S.A. Klein, Y.B. Gianchandani, “A Joule-Thomson Cooling System with a Si/Glass Heat Exchanger for 0.1-1 W Heat Loads,” IEEE International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers), Denver, Colorado, June 2009, 2417-2420
142
S. Green, Y.B. Gianchandani, “A Batch Patterned Self-Expanding Biliary Stent with Conformal Magnetic PDMS Layer and Topologically-Matched Wireless Magnetoelastic Sensor,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 09), Sorrento, Italy, Jan. ’09, 212-215
141
S. Wright, Y.B. Gianchandani, “A Micromachined Quartz and Steel Pressure Sensor Operating Upto 1000°C and 2000 Torr,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 09), Sorrento, Italy, Jan. ’09, 841-844
140
A.T. Evans, S. Chiravuri, Y.B. Gianchandani, “Transdermal Power Transfer For Implanted Drug Delivery Devices Using a Smart Needle and Refill Port,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 09), Sorrento, Italy, Jan. ’09, 252-255
 2008
139
J. Feller, J. Maddocks, B. Helvensteijn, A. Kashani, G. Nellis, Y. Gianchandani, L. Salerno, “Technologies for Cooling of Large Distributed Loads,” AIAA SPACE Conference and Exposition, San Diego, AIAA-2008-7928, Sep. 9-11, 2008, 10 pages
138
K. Takahata, Y.B. Gianchandani, “A Cavity-Less Micromachined Capacitive Pressure Sensor for Wireless Operation in Liquid Ambient,” Solid-State Sensors and Actuators and Microsystems Workshop (Hilton Head ’08), Hilton Head Island, South Carolina, June 2008, 300-303
137
S.A. Wright, Y.B. Gianchandani, “Microdischarge-Based Pressure Sensors for Operation at 1000°C,” Solid-State Sensors and Actuators and Microsystems Workshop (Hilton Head ’08), Hilton Head Island, South Carolina, June 2008, 332-335
136
K. Visvanathan, N.K. Gupta, M.M. Maharbiz, Y.B. Gianchandani, “Flight Initiation and Directional Control of Beetles by Microthermal Stimulation,” Solid-State Sensors and Actuators and Microsystems Workshop (Hilton Head ’08), Hilton Head Island, South Carolina, June 2008, 126-129
135
S.R. Green, Y.B. Gianchandani, “Wireless Biliary Stent System With Wishbone-Array Resonant Magnetoelastic (WARM) Sensor and Conformal Magnetic Layer,” Solid-State Sensors and Actuators and Microsystems Workshop (Hilton Head ’08), Hilton Head Island, South Carolina, June 2008, 158-161
134
C. Eun, Y.B. Gianchandani, “A Micromachined Wireless Gamma Radiation Detector Using Bulk Metal Conversion Layers,” Solid-State Sensors and Actuators and Microsystems Workshop (Hilton Head ’08), Hilton Head Island, South Carolina, June 2008, 308-311
133
C. Eun, Y.B. Gianchandani, “Exploring RF Transmissions From Discharge-Based Micromachined Radiation Detectors,” IEEE International Conference on Technologies for Homeland Security, Boston, MA, May 2008, 18-23
132
M.T. Richardson, Y.B. Gianchandani, “Real-Time Wireless Monitoring of Workpiece Material and Debris Characteristics in Micro-Electro-Discharge Machining,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 08), Tucson, AZ, Jan. ’08, 379-382
131
A.T. Evans, J.M. Park, S. Chiravuri, Y.B. Gianchandani, “Dual Drug Delivery Device for Chronic Pain Management Using Micromachined Elastic Metal Structures and Silicon Microvalves,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 08), Tucson, AZ, Jan. ’08, 252-255
130
N.K. Gupta, Y.B. Gianchandani, “A Knudsen Pump Using Nanoporous Zeolite for Atmospheric Pressure Operation,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 08), Tucson, AZ, Jan. ’08, 38-41
129
W. Zhu, M.J. White, G.F. Nellis, S.A. Klein, Y.B. Gianchandani, “A Perforated Plate Stacked Si/Glass Heat Exchanger with In-Situ Temperature Sensing for Joule-Thomson Coolers,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 08), Tucson, AZ, Jan. ’08, 844-847
 
2007
128
A. Kashani, J.R. Maddocks, G.F. Nellis, and Y.B. Gianchandani, “Technologies for Cooling of Large Distributed and Deployable Loads,” Proc. SPIE 6678, 667804, 2007, 10 pages
127
L. McAfee, K. Najafi, Y. Gianchandani, M. Flynn, K. Wise, M. Maharbiz, “A MEMS/Microsystem/Electronics Curriculum With International Dissemination,” International Conference on Engineering Education & Research, Melbourne, Australia, Dec. 2007, 1-6
126
K. Takahata, Y. Gianchandani, “Bulk-Metal-Based MEMS Fabricated by Micro-Electro-Discharge Machining,” Canadian Conference on Electrical and Computer Engineering, (CCECE), April 2007, 1-4
125
M. Tabib-Azar, R. Wang, S. Mutlu, C.H. Mastrangelo, Y.B. Gianchandani, “Microfabricated gate-Modulated Electrochemical Ion Spectroscopy Sensor,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers), Lyon, France, June 2007, 2307-2310
124
T. Li, A. Barnett, D. Xiao, M. Zhong, Y.B. Gianchandani, “An In Vivo Blood Microsampling Device for Pharmacokinetic Applications,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers), Lyon, France, June 2007, 225-228
123
N.K. Gupta, N. D. Masters, W. Ye, Y.B. Gianchandani, “Gas Flow in Nano-Channels: Thermal Transpiration Models with Application to a Si-Micromachined Knudsen Pump,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers), Lyon, France, June 2007, 2329-2332
122
S.R. Green, M.T. Richardson, F.A. Shariff, Y.B. Gianchandani, “Photochemically Patterned Biliary Stents with Integrated Permanent Magnets and Deformable Assembly Features for Wireless Magnetoelastic Tissue Growth Sensing,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers), Lyon, France, June 2007, 213-217
121
A. Evans, J.M. Park, G.F. Nellis, S.A. Klein, J.R. Feller, L. Salerno, Y.B. Gianchandani, “A Low Power, Microvalve-Regulated Drug Delivery System Using a Si Micro-Spring Pressurized Balloon Reservoir,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers), Lyon, France, June 2007, 359-363
120
A. Basu and Y.B. Gianchandani, “A 128-Bit Digitally-Programmable Microfluidic Platform for Non-Contact Droplet Actuation Using Marangoni Flows,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers), Lyon, France, June 2007, pp. 771-774
119
K. Udeshi, Y.B. Gianchandani, “A DC-Powered High-Voltage Generator Using a Bulk Pt/Rh Oscillating Micro-Relay,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers), Lyon, France, June 2007, 1151-1154
118
S.A. Wright, Y.B. Gianchandani, “A Harsh Environment, Multi-Plasma Microsystem With Pressure Sensor, Gas Purifier, and Chemical Detector,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 07), Kobe, Japan, Jan. ’07, 115-118
117
W. Zhu, M.J. White, D.W. Hoch, G.F. Nellis, S.A. Klein, Y.B. Gianchandani, “Two Approaches to Micromachining Si Heat Exchangers for Joule-Thomson Cryosurgical Probes,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 07), Kobe, Japan, Jan. ’07, 317-320
116
M.T. Richardson, S.R. Green, Y.B. Gianchandani, “Magnetoelastic Wireless Sensing of Tissue Growth for Self-Expanding Biliary Stents,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 07), Kobe, Japan, Jan. ’07, 469-472
115
J.M. Park, T.R. Brosten, A. Evans, K. Rasmussen, G.F. Nellis, S.A. Klein, J.R. Feller, L. Salerno and Y.B. Gianchandani, “A Piezoelectric Microvalve with Integrated Sensors for Cryogenic Applications,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 07), Kobe, Japan, Jan. ’07, 647-650
114
A. Basu, S.Y. Yee, Y.B. Gianchandani, “Virtual Components for Droplet Control Using Marangoni Flows: Size-Selective Filters, Traps, Channels, and Pumps,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 07), Kobe, Japan, Jan. ’07, 401-404
113
C. Eun, T.-C. Fung, B. Mitra, Y.B. Gianchandani, “A Magnetically Enhanced 3-Electrode Wireless Micro-Geiger Counter,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 07), Kobe, Japan, Jan. ’07, 599-602
 
2006
112
Y.B. Gianchandani, “From Antenna Stents to Wireless Geiger Counters: The Promise of Electrical Micro-Discharges in the Fabrication and Operation of Microsensors,” International Symposium on Micro-Nano Mechatronics and Human Science, Nagoya, Japan, Nov. 2006, 6 pages (invited plenary)
111
N.K. Gupta and Y.B. Gianchandani, “Modeling and Simulation of a Surface Micromachined Knudsen Pump,” ASME Annual International Mechanical Engineering Congress and Exposition, Chicago, Nov. 5-10, 2006, 7 pages
110
D.W. Hoch, W. Zhu, G.F. Nellis, S.D. Schuetter, S.A. Klein, Y.B. Gianchandani, “Progress Towards a Micromachined Heat Exchanger for a Cryosurgical Probe,” Proceedings of the Fourteenth International Cryocoolers Conference, 2006, paper number C14-9-6, pp. 1-10
109
A. Evans, J.M. Park, R.P. Taylor,T.R. Brosten, G.F. Nellis, S.A. Klein, J.R. Feller, L. Salerno and Y.B. Gianchandani, “A Low Power, Micromachined Proportional Valve for Drug Delivery,” The Tenth International Conference Miniaturized Chemical and Biochemical Analysis Systems (MicroTAS 2006), Tokyo, November 5-9 2006, 3 pages
108
T. Li and Y.B. Gianchandani, “An Empirical Model for a Piezoelectric Tissue Contrast Sensor Embedded in a Biopsy Tool,” The Tenth International Conference Miniaturized Chemical and Biochemical Analysis Systems (MicroTAS 2006), Tokyo, November 5-9 2006, 3 pages
107
L.C. MAfee, Y. B. Gianchandani, K. Najafi, M. M. Maharbiz, and K. D. Wise “MEMS and Microsystems Courses with national and International Dissemination,” American Society of Engineering Education (ASEE) Annual Conference & Exposition, Chicago, June ’06, paper #2332
106
L.C. McAfee, K. Najafi, Y.B. Gianchandani, K.D. Wise, M.M. Maharbiz, D. Aslam, P. Bergstrom, C. Friedrich, “A MEMS/Microsystem Curriculum With International Dissemination,” Solid-State Sensors and Actuators Workshop Educational Poster Digest (Hilton Head ’06), Hilton Head Island, South Carolina, June ’06, pp. 1-6
105
C.E. Eun, R. Gharpurey, Y.B. Gianchandani, “A Magnetically Enhanced Wireless MicroGeiger Counter,” Solid-State Sensors and Actuators Workshop (Hilton Head ’06), Hilton Head Island, South Carolina, June ’06, pp. 236-9
104
W. Zhu, D.W. Hoch, G.F. Nellis, S.A. Klein, Y.B. Gianchandani, “A Planar Glass/Si Micromachining Process for the Heat Exchanger in a J-T Cryosurgical Probe,” Solid-State Sensors and Actuators Workshop (Hilton Head ’06), Hilton Head Island, South Carolina, June ’06, pp. 51-55
103
M.T. Richardson, R. Gharpurey, Y.B. Gianchandani, “Wireless Sensing of Discharge Characteristics for Quality Control in Batch Mode Micro-Electro-Discharge Machining,” Solid-State Sensors and Actuators Workshop (Hilton Head ’06), Hilton Head Island, South Carolina, June ’06, pp. 404-7
102
J.M. Park, R.P. Taylor, A.T. Evans, T.R. Brosten, G.F. Nellis, S.A. Klein, J.R. Feller, L. Salerno, Y.B. Gianchandani, “A Piezoelectrically Actuated Ceramic-Si-Glass Microvalve for Distributed Cooling Systems,” Solid-State Sensors and Actuators Workshop (Hilton Head ’06), Hilton Head Island, South Carolina, June ’06, pp. 248-251
101
B. Mitra, B. Levey, T.-C. Fung, Y.B. Gianchandani, “A Handheld Microdischarge Spectroscopy System for High-Speed Chemical Analysis of Gaseous and Liquid Samples,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 06), Istanbul, Turkey, Jan. ’06, pp. 554-7
100
S. Wright, Y.B. Gianchandani, “A Micromachined Titanium Sputter Ion Pump for Cavity Pressure Control,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 06), Istanbul, Turkey, Jan. ’06, pp. 754-7
99
T. Li, R.Y. Gianchandani, Y.B. Gianchandani, “A Bulk PZT Microsensor for In-Situ Tissue Contrast Detection During Fine Needle Aspiration Biopsy of Thyroid Nodules,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 06), Istanbul, Turkey, Jan. ’06, pp. 12-15
98
C.E. Eun, R. Gharpurey, Y.B. Gianchandani, “Controlling Ultra Wide Band Transmissions from a Wireless Micromachined Geiger Counter,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 06), Istanbul, Turkey, Jan. ’06, pp. 570-3
97
M.T. Richardson, Y.B. Gianchandani, D.S. Skala, “A Parametric Study of Dimensional Tolerance and Hydrodynamic Debris Removal in Micro-Electro-Discharge Machining,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 06), Istanbul, Turkey, Jan. ’06, pp. 314-7
 2005
96
Y. Shimamura, K. Udeshi, L. Que, J. Park and Y. B. Gianchandani, “Energy Efficiency of Pulse Driven Bent-Beam Electrothermal Actuators,” Proceedings of Mechanical Engineering Congress, 2005 Japan (MECJ-05), 05-1(7), pp.123-124, Sept.19-21, 2005, Chofu, Japan (in Japanese)
95
R.P. Taylor, G.F. Nellis, S.A. Klein, D.W. Hoch, J. Fellers, P. Roach, J.M. Park, Y. Gianchandani, “Measurements of the Material Properties of a Laminate Piezoelectric Stack at Cryogenic Temperatures,” 30th InternationalCryogenic Materials Conference, Keystone, Colorado, Aug 29-Sept. 2, 2005, 8 pages
94
J.M. Park, S. Mutlu, Y.B. Gianchandani, “Nano-scale Abrasion Studies of Materials Used in MEMS Devices and Packages,” ASME Annual International Mechanical Engineering Congress and Exposition, Orlando, FL, Nov. 5-11, 2005, 5 pages
93
K. Udeshi, M.T. Richardson, J.-J. Hung, L. Que, G. Rebeiz, Y.B. Gianchandani, “A Dual-EDM Reverse Damascene Process for RF Switches and Other Bulk Metal Devices,” ASME Annual International Mechanical Engineering Congress and Exposition, Orlando, FL, Nov. 5-11, 2005, 5 pages
92
A. Bhuyan, H. Lei, S.Y. Yee, and Y.B. Gianchandani, “Pulse and DC Electropolishing of Stainless Steel for Stents and Other Devices,” IEEE Conference on Sensors, Irvine, California, Nov. ’05, pp. 314-317.
91
C.K. Eun, R. Gharpurey, and Y.B. Gianchandani, “Broadband Wireless Sensing of Radioactive Chemicals Utilizing Inherent RF Transmissions from Pulse Discharges,” IEEE Conference on Sensors, Irvine, California, Nov. ’05, pp. 273-276.
90
B. Mitra and Y.B. Gianchandani, “Micro Arc-Plasma Hybrids for Detection of Vapors at Atmospheric Pressure,” IEEE Conference on Sensors, Irvine, California, Nov. ’05, pp. 326-329.
89
M.T. Richardson and Y.B. Gianchandani, “A Passivated Electrode Batch µEDM Technology for Bulk Metal Transducers and Packages,” IEEE Conference on Sensors, Irvine, California, Nov. ’05, pp. 219-222.
88
S. Mutlu, A. Basu, and Y.B. Gianchandani, “Maskless Electrochemical Patterning of Gold Films for BioSensors Using Micromachined Polyimide Probes,” IEEE Conference on Sensors, Irvine, California, Nov. ’05, pp. 1173-1177.
87
W. Zhu, Y.B. Gianchandani, G. Nellis, and S. Klein, “Micromachined Heat Exchanger for a Cryosurgical Probe,” The 11th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC 2005), Beligrate, Italy, September ’05, pp. 112-116
86
A. Basu and Y.B. Gianchandani, “Microthermal Techniques for Mixing, Concentration, and Harvesting of DNA and Other Microdroplet Suspensions,” The Ninth International Conference Miniaturized Chemical and Biochemical Analysis Systems (MicroTAS 2005) Boston, MA, October 2005, pp. 131-134.
85
A. Basu and Y.B. Gianchandani, “Trapping and Manipulation of Particles and Droplets Using Micro-Toroidal Convection Currents,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers), Seoul, Korea, June 2005, pp. 85-88.
84
K. Takahata and Y.B. Gianchandani, “A Micromachined Polyurethane/Stainless-Steel Capacitive Pressure Sensor Without Cavity and Diaphragm,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers), Seoul, Korea, June 2005, pp. 483-486.
83
K. Liao, K. Udeshi, L. Que, A. Galvanauskas, and Y. B. Gianchandani, “Monolithic fiber-grating and MEMS based devices for controllable ultrafast pulse shaping,” Photonics West 2005, Fiber Lasers: Technology, Systems, and Applications II, San Jose Jan 22 – 27, 2005. (To be published in Proceedings of SPIE vol. #5709, paper 5709-2)
82
A.S. Basu and Y.B. Gianchandani, “High Speed Microfluidic Doublet Flow in Open Pools Driven by Non-Contact Micromachined Thermal Sources,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 05), Miami, FL, Jan. ’05, pp. 666-669
81
B. Mitra and Y.B. Gianchandani, “The Micromachined FlashFET: A Low-Power, Three-Terminal Device For High Speed Detection of Vapors at Atmospheric Pressure,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 05),Miami, FL, Jan. ’05, pp. 794-797
80
K. Udeshi, K.-H. Liao, L. Que, A. Galvanauskas, and Y.B. Gianchandani, “A Micromachined Platform for Localized Index Modulation in Chirped Fiber Bragg Gratings and Its Application to Ultrafast Optical Pulse Shaping,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 05), Miami, FL, Jan. ’05, pp. 239-242
79
K. Takahata and Y.B. Gianchandani, “Micromachined Intraluminal Devices for Active and Passive Electromagnetic Measurements of Flow,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 05), Miami, FL, Jan. ’05, pp. 112-115
78
T. Li and Y.B. Gianchandani, “A Die-Scale Micromachining Process for Bulk PZT and its Application to In-Plane Actuators,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 05), Miami, FL, Jan. ’05, pp. 387-391
77
C.G. Wilson, C.K. Eun, and Y.B. Gianchandani, “D-MicroGeiger: A Microfabricated Beta-Particle Detector with Dual Cavities for Energy Spectroscopy,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 05), Miami, FL, Jan. ’05, pp. 622-625
 2004
76
B. Mitra and Y.B. Gianchandani, “On the Temporal Evolution of Micro-Discharge Spectra and Detection of Organic Vapors in Air,” International Conference on Miniaturized Chemical and Biochemical Analysis Systems (µTAS 2004), Malmo, Sweden, September 2004, pp. 420-422
75
Y.B. Gianchandani, “Challenges and Opportunities in Multi-Sensing Microsystems – A Case Study,” IEEE Conference on Sensors, Vienna, Austria, Oct. ’04 (invited paper), pp. 985-986
74
A.S. Basu, S. McNamara, and Y.B. Gianchandani, “Maskless Lithography By Patterned Heating of Photoresist Using Ultra-Compliant Thermal Probe Arrays,” International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN00), San Diego, California, Jun. ’04, pp. 109-110
73
C.G. Wilson and Y.B. Gianchandani, “MicroGeiger: A Microfabricated Gas-Based Beta Radiation Detector,” Solid-State Sensors and Actuators Workshop (Hilton Head ’04), Hilton Head Island, South Carolina, June ’04, pp. 53-56
72
K. Takahata and Y.B. Gianchandani, “A Micromachined Stainless Steel Cuff for Electromagnetic Measurement of Flow in Blood Vessels,” Solid-State Sensors and Actuators Workshop (Hilton Head ’04), Hilton Head Island, South Carolina, June ’04, pp. 290-293
71
K. Udeshi and Y.B. Gianchandani, “A Transistorless Micromechanical High Voltage Generator Using a DC-Powered Self-Oscillating Relay,” Solid-State Sensors and Actuators Workshop (Hilton Head ’04), Hilton Head Island, South Carolina, June ’04, pp. 262-265
70
T. Li and Y.B. Gianchandani, “LEEDUS: A Micromachining Process for Die-scale Pattern Transfer in Ceramics with High Resolution and Throughput,” Solid-State Sensors and Actuators Workshop (Hilton Head ’04), Hilton Head Island, South Carolina, June ’04, pp. 324-327
69
C.G. Wilson and Y.B. Gianchandani, “Room Temperature Deposition of Silicon by Arrayed DC Microplasmas,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 04), Maastricht, The Netherlands, Jan. ’04, pp. 765-768
68
S. McNamara, A. Basu, J.-H. Lee and Y.B. Gianchandani, “Ultracompliant, Passively Decoupled, Thermal Probe Arrays: Large Area Mapping of Non-Planar Surfaces Without Force Feedback,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 04),  Maastricht, The Netherlands, Jan. ’04, pp. 825-828
67
K. Takahata, A. DeHennis, K.D. Wise, and Y.B. Gianchandani, “A Wireless Microsensor for Monitoring Flow and Pressure in a Blood Vessel Utilizing a Dual-Inductor Antenna Stent and Two Pressure Sensors,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 04), Maastricht, The Netherlands, Jan. ’04, pp. 216-219
66
L. Que, K. Udeshi, J.-H. Park and Y.B. Gianchandani, “A Bi-Stable Electro-thermal RF Switch for High Power Applications,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 04),  Maastricht, The Netherlands, Jan. ’04, pp. 797-800
65
S. Mutlu, F. Svec, C.H. Mastrangelo, J.M.J. Frechet, and Y.B. Gianchandani, “Enhanced Electro-Osmotic Pumping with Liquid Bridge and Field Effect Flow RectificationIEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 04),  Maastricht, The Netherlands, Jan. ’04, pp. 850-853
64
K. Udeshi and Y.B. Gianchandani, “A DC-Powered, Tunable, Fully Mechanical Oscillator using In-Plane Electrothermal Actuation,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 04), Maastricht, The Netherlands, Jan. ’04, pp. 502-505
 2003
63
K. Takahata, A. DeHennis, K.D. Wise, and Y.B. Gianchandani, “Stentenna: A Micromachined Antenna Stent for Wireless Monitoring of Implantable Microsensors,” The 25th Annual International Conference of the IEEE Engineering In Medicine And Biology Society (EMBS 2003), Cancun, Mexico, September 2003, pp. 3360–3363, Vol.4
62
B. Mitra, C. Wilson, L. Que, and Y.B. Gianchandani, “A Micro-Fluidic Ultra-Violet Emission Source For Direct Fluorescence of Tryptophan,” The 25th Annual International Conference of the IEEE Engineering In Medicine And Biology Society (EMBS 2003), Cancun, Mexico, September 2003, pp. 3380–3383, Vol.4
61
L. Que, P. Selvaganapathy, B. Mitra, C.G. Wilson, and Y.B. Gianchandani, “Dye-Fluorescence LEd-SpEC: A Battery-Operated, On-Chip, Wavelength-Tunable Optical Source for Detection of Biochemicals,” International Conference on Miniaturized Chemical and Biochemical Analysis Systems (µTAS 2003), Squaw Valley, California, October 2003, pp. 1251-1254
60
S. McNamara and Y.B. Gianchandani, “A Micromachined Knudsen Pump for On-Chip Vacuum,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers), Boston, MA, June 2003, pp. 1919-1922
59
S. Mutlu, C. Yu, F. Svec, C.H. Mastrangelo, J.M.J. Frechet, and Y.B. Gianchandani, “A Thermally Responsive Polymer Microvalve Without Mechanical Parts, Photo-Patterned in a Parylene Channel,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers), Boston, MA, June 2003, pp. 802-805
58
L. Que, C.G. Wilson, J.A.E. de la Rode, and Y.B. Gianchandani, “A Water Spectroscopy Microsystem with Integrated Discharge Source, Dispersion Optics, and Sample Delivery,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers), Boston, MA, June 2003, pp. 32-35
57
L.L. Chu, K. Takahata, P. Selvaganapathy, J.L. Shohet, and Y.B. Gianchandani, “A Micromachined Kelvin Probe for Surface  Potential Measurements in Microfluidic Channels and Solid-State Applications,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers), Boston, MA, June 2003, pp. 384-387
56
J. Lee and Y.B. Gianchandani, ”A Scanning Thermal Microscopy System with a Temperature Dithering, Servo-Controlled Interface Circuit,” IEEE International Symposium on Circuits and Systems (ISCAS), Bangkok, Thailand, May 2003, pp.IV-812 – IV-815, vol.4
55
K. Takahata and Y.B. Gianchandani, “Coronary Artery Stents Microfabricated From Planar Metal Foil: Design, Fabrication, and Mechanical Testing,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 03), Kyoto, Jan. ’03, pp. 462-5
54
L.L. Chu, D. Nelson, A.D. Oliver, and Y.B. Gianchandani, “Performance Enhancement of Polysilicon Electrothermal Microactuators by Localized Self-Annealing,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 03), Kyoto, Jan. ’03, pp. 68-71
53
S. McNamara and Y. Gianchandani, “A Fabrication Process with High Thermal Isolation and Vacuum Sealed Lead Transfer for Gas Reactors and Sampling Microsystems,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 03),  Kyoto, Jan. ’03, pp. 646-9
 2002
52
J.-H. Lee, M.-H. Li, and Y.B. Gianchandani, “Photoresist Metrology and Microcalorimetry Using an Ultracompliant Micromachined Scanning Thermal Probe,” International Workshop on Thermal Investigations of ICs and Systems (THERMINIC 2002), Madrid, Spain, October ’02, pp. 111-116
51
L.L. Chu and Y.B. Gianchandani, “A Silicon Micromachined, Feedback Controlled 2D MicroPositioner with Sub-Nanometer Resolution,” International Workshop on Thermal Investigations of ICs and Systems (THERMINIC 2002), Madrid, Spain, October ’02, pp. 95-99
50
L.L. Chu, D. Nelson, A.D. Oliver, and Y.B. Gianchandani, “Polysilicon Grain Transformations and Performance Drift in Electrothermal Microactuators,” International Workshop on Thermal Investigations of ICs and Systems (THERMINIC 2002), Madrid, Spain, October ’02, pp. 100-104
49
C.G. Wilson, A.E. Wendt, and Y.B. Gianchandani, “High Voltage Limits for Electrostatic Transducers: On the Role of Ambient Pressure and Device Dimension in MicroDischarges,” Solid-State Sensors and Actuators Workshop (Hilton Head ‘02), Hilton Head Island, South Carolina, June ’02, pp. 370-371
48
M.-H. Li, J.-H. Lee, F. Cerrina, A. Menon, and Y. Gianchandani, “Chemical and Biological Diagnostics Using Fully Insulated, Ultracompliant Thermal Probes,” Solid-State Sensors and Actuators Workshop (Hilton Head ‘02), Hilton Head Island, South Carolina, June ’02, pp. 235-238
47
K. Thompson, J.H. Booske, R.F. Cooper, and Y.B. Gianchandani, “Electromagnetic Induction Heating for the 70 nm Node,” 2002 Materials Research Society Spring Meeting, paper c1.3, San Francisco, April ’02
46
C. Wilson and Y.B. Gianchandani, “LEd-SpEC: Spectroscopic Detection of Water Contaminants Using Glow Discharges from Liquid Microelectrodes,” IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 02),  Las Vegas, Jan. ’02, pp. 248-51
 2001
45
Y.B. Gianchandani, “Plasma and Arc Microdischarges: New Avenues in Microfabrication,” IEEE International Semiconductor Device Research Symposium, Washington, D.C, Dec. 2001, pp. 423-6
44
K. Thompson, J. H. Booske, R.F. Cooper, Y.B. Gianchandani, D. F. Downey “RF and Microwave Annealing for Ultra Shallow Junction Formation,” in Rapid Thermal and Other Short-Time Processing Technologies II, pp. 121-8 of Proceedings of the 199th Meeting of the Electrochemical Society, 25 March, 2001, Washington D.C.  The website location is: http://www.electrochem.org/publications/pv/published/2001.htm
43
K. Thompson, J.H. Booske, Y.B. Gianchandani, R. Cooper, Y. Bykoov, A. Eremeev, I. Plotnikov, “Electromagnetic Induction Heating for Cold Wall Rapid Thermal Processing,” Proc. 9th International Conference on Advanced Thermal Processing of Semiconductors (RTP 2001), Anchorage, AK, 25-29 September, pp. 190-196
42
K. Thompson, J. Booske, Y. Gianchandani, and R. Cooper, “RF and Microwave Magnetic Induction Heating of Silicon Wafers,” 8th International Conference on Microwave and High Frequency Heating (Ampere 2001), Bayreuth, Germany, Sept. 2001
41
S. McNamara and Y. Gianchandani, “A 19-Element Shock Sensor Array for Bi-Directional Substrate-Plane Sensing Fabricated by Sacrificial LIGA,” IEEE International Conf. on Solid-State Sensors and Actuators (Transducers ’01), Munich, Germany, June 2001, pp. 450-3
40
K. Fischer, B. Chauduri, S. McNamara, H. Guckel, and Y. Gianchandani, “A Latching, Bistable Optical Fiber Switch Combining LIGA Technology with Micromachined Permanent Magnets,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers ’01), Munich, Germany, June 2001, pp. 1340-3
39
K. Takahata and Y. Gianchandani, “Parallel Discharge with Partitioned Electrode Arrays for Accelerated Batch Mode Micro-EDM,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers ’01), Munich, Germany, June 2001, pp. 1598-1601
38
L. Chu, J. Hetrick, and Y. Gianchandani, “Compliant Microtransmissions for Rectilinear Electrothermal Actuators,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers ’01), Munich, Germany, June 2001, pp. 714-7
37
J.-S. Park and Y. Gianchandani, “A Servo-Controlled Capacitive Pressure Sensor with a Three-Mask Fabrication Sequence,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers ’01), Munich, Germany, June 2001, pp. 506-9
36
K. Thompson, Y. Gianchandani, J. Booske, and R. Cooper, “Si-Si Bonding Using RF and Microwave Radiation,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers ’01), Munich, Germany, June 2001, 226-9
35
C. Wilson and Y. Gianchandani, “Progress in Silicon Etching by In-Situ DC MicroPlasmas,” Proc., IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 01),  Interlaken, Switzerland, Jan. ’01, pp. 26-9
34
K. Takahata and Y. Gianchandani, “Batch Mode Micro-EDM for High Density and High-Throughput Micromachining,” Proc., IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 01), Interlaken, Switzerland, Jan. ’01, pp. 72-5
33
M. Jain, C. Grimes, K. Takahata, Y. Gianchandani, S. Singh, and A. Mason, “Magnetoelastic Microsensors for Environmental Monitoring,” Proc., IEEE/ASME International Conf. on Micro Electro Mechanical Systems (MEMS 01), Interlaken, Switzerland, Jan. ’01, pp. 278-81
32
L. Chu, L. Que, and Y. Gianchandani, “Temperature Coefficients of Material Properties for Electrodeposited MEMS,” Proc., IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 01), Interlaken, Switzerland, Jan. ’01, pp. 68-71
31
L. Que, L. Otradovec, A. Oliver, and Y. Gianchandani, “Pulse and DC Operation Lifetimes of Bent-Beam Electrothermal Actuators,” Proc., IEEE/ASME International Conference on Micro Electro Mechanical Systems (MEMS 01), Interlaken, Switzerland, Jan. ’01, pp. 570-3
 2000
30
L. Que and Y.B. Gianchandani, “Experimental Comparison of the Mechanical Properties of E-Beam Photoresists,” International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN00), Palm Springs, California, Jun. ’00
29
M.-H. Li and Y.B. Gianchandani, “Analysis and Application of a Polyimide Micromachined Scanning Thermal Probe,” International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN00), Palm Springs, California, Jun. ’00
28
C. Wilson and Y. Gianchandani, “In-Situ MicroPlasmas for Rapid Dry Etching of Silicon,” Solid-State Sensors and Actuators Workshop (Hilton Head ‘00), Hilton Head Island, South Carolina, June ’00, pp. 335-8
27
L. Chu, J. Hetrick, and Y. Gianchandani, “Electro-Thermal Actuators Using Optimized Compliant MicroTransmissions as Rectilinear Motion Amplifiers,” Solid-State Sensors and Actuators Workshop (Hilton Head ‘00), Hilton Head Island, South Carolina, June ’00, pp. 218-21
26
L. Chu, L. Que, and Y. Gianchandani, “Temperature Coefficients of Material Properties Using Differential Capacitive Strain Sensors,” Solid-State Sensors and Actuators Workshop (Hilton Head ‘00), Hilton Head Island, South Carolina, June ’00, pp. 312-5
25
K. Thompson, J.H. Booske, R.F. Cooper, Y.B. Gianchandani, “Temperature Measurement in Microwave-Heated Silicon Wafers,” Proc. of Selcted Papers from the Second World Congress on Microwave and Radio Frequency Processing, April 2000, to be published in Ceram. Trans. The American Ceramic Society, Westerville, OH
24
L. Que, J.-S. Park, M.-H. Li, and Y. Gianchandani, “Reliability Studies of Bent-Beam Electro-Thermal Actuators,” IEEE International Reliability Physics Symposium (IRPS00), San Jose, California, Apr. ’00, pp. 118-122
23
L. Que, G. Witjaksono, and Y. Gianchandani, “Modeling and Design of a Micromechanical Phase-Shifting Gate Optical Modulator,” International Conference on Modeling and Simulation of Microsystems (MSM00), San Diego, California, Mar. ’00, pp. 664-7
22
S.B. Crary, B. Affour, H.J. Lee, D. Bernstein, Y. Gianchandani, D.M. Woodcock, M.A. Maher, “Generation of a Metamodel for a Micromachined Accelerometer using T-SPICE™ and the Iz-Optimality Option of I-OPT™,” International Conference on Modeling and Simulation of Microsystems (MSM00), San Diego, California, Mar. ’00, pp. 201-4
21
J.-S. Park, L.L Chu, E. Siwapornsathain, A.D. Oliver, and Y. Gianchandani, “Long Throw and Rotary Output Electro-Thermal Actuators Based on Bent-Beam Suspensions,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS00), Miyazaki, Japan, Jan. ’00, pp. 680-5
20
M.-H. Li and Y. Gianchandani, “High Performance Scanning Thermal Probe Using a Low Temperature Polyimide-Based Micromachining Process,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS00), Miyazaki, Japan, Jan. ’00, pp. 763-8
 1999 and Earlier
19
J. Seefeldt, Y. Gianchandani, M. Mattes, L. Reimer “A Porous Si Process for Encapsulated Single Crystal, Surface Micromachined Microstructures,” SPIE International Symposium on Micromachining and Microfabrication, Santa Clara, California, Sept. ’99, pp. 258-68
18
L. Que, Y. Gianchandani, and F. Cerrina, “Residual Strain Characterization of E-Beam Photoresist,” International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN99), Marco Island, Florida, Jun. ’99
17
Y. Gianchandani, “Micromachined Sensors and Actuators Based on Bent-Beam Suspensions,” SPIE International Conference on Smart Materials, Structures and Systems, Bangalore, July ’99, pp. 159-66
16
J.-S. Park and Y. Gianchandani, “A Low Cost Batch-Sealed Capacitive Pressure Sensor,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS99), Orlando, Florida, Jan. ’99, pp. 82-7
15
L. Que, J.-S. Park and Y. Gianchandani, “Bent-Beam Electro-Thermal Actuators for High Force Applications,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS99), Orlando, Florida, Jan. ’99, pp. 31-6
14
L. Que, M.-H. Li, L.L. Chu, and Y. Gianchandani, “A Micromachined Strain Sensor with Differential Capacitive Readout,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS99), Orlando, Florida, Jan. ’99, pp. 552-7
13
Y. Gianchandani, H. Kim, M Shinn, B. Ha, B. Lee, K. Najafi, and C. Song, “A MEMS-First Fabrication Process for Integrating CMOS Circuits with Polysilicon Microstructures,” Proc. Eleventh IEEE International Workshop on Micro Electro Mechanical Systems (MEMS98), pp. 257-262, Heidelberg, Germany, Jan. ’98
12
Y. Gianchandani, M. Shinn, and K. Najafi, “Impact of Long, High Temperature Anneals on Residual Stress in Polysilicon,” Tech. Dig., International Conference on Solid-State Sensors and Actuators (Transducers), Chicago, June ’97, pp. 623-4
11
S. Crary and Y. Gianchandani, “Parametric Modeling of a Microaccelerometer Using I-Optimal Design of Experiments for Finite Element Analysis,” MEMS Proceedings, ASME International Mechanical Engineering Congress and Exposition, (DSC-vol.59), pp. 267-273, Atlanta, Nov. 1996
10
Y. Gianchandani, K. Ma, and K. Najafi, “A CMOS Dissolved Wafer Process for Integrated P++ Microelectromechanical Systems,” Tech. Dig., International Conference on Solid-State Sensors and Actuators (Transducers), pp. 79-82, Stockholm, June ’95
9
Y. Gianchandani and K. Najafi, “Bulk Silicon Micromachining for the Scanning Thermal Profiler and Other Applications,” Proc., SPIE (International Society for Optical Engineering)Symposium on Integrated Optics and Microstructures, San Diego, July ’94, pp. 52-61 (invited paper)
8
Y. Gianchandani and K. Najafi, “A Compact Passive Strain Sensor With a Bent Beam Deformation Multiplier and a Complementary Motion Vernier,” Tech. Digest, Solid-State Sensor and Actuator Workshop (Hilton Head ’94), pp. 116-118, Hilton Head Island, South Carolina, June ’94
7
G.K. Ananthasuresh, S. Kota, and Y. Gianchandani, “A Methodical Approach to the Design of Compliant Micromechanisms,” pp. 189-192, ibid.
6
Y. Gianchandani, K. Najafi, and B. Orr, “Silicon Micromachined Thermal Profilers,” Tech. Digest, International Electron Devices Meeting (IEDM), pp.191-194, Washington, D.C., Dec. ’93
5
G.K. Ananthasuresh, S. Kota, and Y. Gianchandani, “Systematic Synthesis of Microcompliant Mechanisms – Preliminary Results,” National Applied Mechanisms and Robotics Conference, Cincinnati, Nov. ’93
4
Y. Gianchandani and K. Najafi, “Batch Fabrication and Assembly of Micromotor Driven Mechanisms with Multi-Level Linkages,” Proc. Fifth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS), pp. 141-146, Travemunde, Germany, Feb. ’92
3
Y. Gianchandani and K. Najafi, “Micron-Sized, High Aspect Ratio Bulk Silicon Micromechanical Devices,” pp. 208-213, ibid.
2
Y. Gianchandani and K. Najafi, “A Bulk Silicon Dissolved Wafer Process for Microelectromechanical Systems,” Tech. Digest, International Electron Devices Meeting (IEDM), pp. 757-760, Washington, D.C., Dec. ’91
1
B. Ziaie, Y. Gianchandani, and K. Najafi, “A High-Current IrOx Thin-Film Neuromuscular Microstimulator,” Tech. Digest, International Conference on Solid-State Sensors and Actuators (Transducers), pp. 124-127, San Francisco, June ’91